PI (Physik Instrumente), a prominent name in precision motion control, has unveiled its latest innovation: the A-361 air-bearing XY-rotation stage. This compact nanopositioning platform, measuring just 39.5 mm in height, is designed to deliver ultra-high precision and stability for various demanding research and industrial applications.
The A-361 features a wide 200 mm diameter motion platform, offering translational motion capabilities of 5 mm in both the X and Y axes and rotational motion around the Z axis of 2°. These specifications position the A-361 as a robust solution for environments requiring meticulous accuracy.
High Precision for Advanced Applications
The performance metrics of the A-361 highlight its suitability for critical tasks. The minimum incremental motion is less than 30 nm for linear axes and below 0.5 μrad for rotational movement. The calibrated positioning accuracy stands at ±0.2 μm in XY and ±5 μrad in θZ, with bidirectional repeatability reaching 0.2 μm in XY and 4 μrad in rotation.
Applications for this stage include wafer inspection, flat-panel display metrology, fiber and optics alignment, maskless lithography, and micro-LED manufacturing. Its clean, non-contact design ensures that it meets the rigorous demands of semiconductor and photonics production environments.
Innovative Design Enhances Stability and Efficiency
The A-361 incorporates frictionless air bearings and non-contact motors, promoting smooth motion and virtually eliminating wear, which results in a maintenance-free operation. This design contributes to a service life that can be measured in decades. Integrated position-locking further enhances stability, effectively eliminating servo jitter during critical measurement and alignment tasks.
This platform also includes a built-in vacuum chuck that accommodates wafers or other delicate substrates, making it an ideal choice for semiconductor and optics applications. Its lightweight construction, made from hard-anodized aluminum, supports payloads of up to 3 kg while ensuring durability.
Voice-coil direct drives provide a frictionless and highly dynamic response, generating up to 6 N of continuous force and 19.2 N peak force. Designed for cleanroom operation, the A-361 requires only dry, oil-free compressed air that complies with ISO 8573-1 purity standards. The air consumption is limited to 28 L/min, making the system efficient for continuous operation.
When paired with the A-523 Z Tip/Tilt Stage, the A-361 forms a comprehensive six-degree-of-freedom nanopositioning stack, enabling complete spatial control for precision alignment tasks in photonics, optics, and micro-assembly. PI also offers a range of integrated accessories, including air-preparation kits, multi-axis controllers, and custom cabling solutions to ensure seamless system integration and enhanced performance.
For further information on the A-361 Low Profile XY-Rotation Air-Bearing Nanopositioning Stage, interested parties can visit PI’s website or contact their customer service. The launch of this innovative platform marks a significant advancement in precision motion control technology, reinforcing PI’s position as a leader in the field.